Evaluation of Mode Dependent Fluid Damping in a High Frequency Drumhead Microresonator

Santhosh Doreswamy Vishwakarma, Ashok Kumar Pandey, Jeevak M. Parpia, Darren Robert Southworth, Robert Anthony Barton, Harold G. Craighead, and Rudra Pratap

JMEMS, 23 334-346 (2014). DOI: 10.1109/JMEMS.2013.2273803

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Depiction of squeeze-film damping and acoustic radiation loss regions, respectively, corresponding to fundamental mode of vibration