A MEMS RF Phase and Frequency Modulator

R. B Reichenbach, K. L. Aubin, M. Zalalutdinov, J. M. Parpia and H. G. Craighead

Transducers ’05, IEEE 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 5 9, 2005. Digest of Technical Papers, IEEE Cat No 05TH8791, 1059-62, Vol 1 (2005).