Temperature Dependent Internal Friction in Silicon Nanoelectromechanical Systems

S. Evoy, A. Olkhovets, D. W. Carr, L. Sekaric, J. M. Parpia, and H. G. Craighead

Appl. Phys. Lett. 77, 2397 (2000); http://dx.doi.org/10.1063/1.1316071

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