Resistively actuated micromechanical dome resonators
R. B. Reichenbach, M. K. Zalalutdinov, K. L. Aubin, D. A. Czaplewski, B. Illic, B. H. Houston, H. G. Craighead, J. M. Parpia
Proc. of SPIE, 5344, 51-8, in MEMS/MOEMS Components and their Applications, Siegfried W. Janson, Albert K. Henning; Eds., (2004). doi: 10.1117/12.524175