Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon, D. Joe, R.A. Barton, R.B. Ilic, S.Krylov, J.M. Parpia, H.G. Craighead

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 485-488, (2011), 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 DOI:10.1109/MEMSYS.2011.5734467

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