Piezoresistive transduction in multilayer polycrystalline silicon resonators

J.D. Cross, B.R. Ilic, M.K. Zalalutdinov, W. Zhou, J.W. Baldwin, B.H. Houston, H.G. Craighead, and J.M. Parpia

Appl. Phys. Lett 95 133113-1-3 (2009) doi:10.1063/1.3241077