Nanomechanical Resonant Structures in silicon nitride: fabrication operation and dissipation issues

L. Sekaric, D. W. Carr, S. Evoy, J. M. Parpia and H. G. Craighead

Sensors and Actuators A 101, 215-219, (2002). DOI: 10.1016/S0924-4247(02)00149-8

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