Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Sunwoo Lee, Vivekananda P. Adiga, Robert A. Barton, Arend van der Zande, Gwan-Hyoung Lee, B. Rob Ilic, Alexander Gondarenko, Jeevak M. Parpia, Harold G. Craighead, James Hone

Nano Letters vol 13, pp. 4275-4279 (2013)