Rev. Sci. Instr.,073902-1-10, v 89 (2018)
https://doi.org/10.1063/1.5031837
Fabrication of microfluidic cavities using Si-to-glass anodic bonding
Parpia Lab
Low Temperature Physics
Rev. Sci. Instr.,073902-1-10, v 89 (2018)
https://doi.org/10.1063/1.5031837