Fabrication of a Nanomechanical Mass Sensor Containing a Nanofluidic Channel

Robert A. Barton, B. Ilic, Scott S. Verbridge, Benjamin R. Cipriany, Jeevak M. Parpia, Harold G. Craighead,

Nanoletters 10, 20582063 (2010) DOI: 10.1021/nl100193g