Estimation of acoustic losses in the quality factor of a micromechanical 2D resonator

Santhosh Vishwakarma, Rudra Pratap, Rudra, Ashok Kumar Pandey, Jeevak M. Parpia, Darren Robert Southworth,Robert Anthony Barton, Harold G. Craighead

20th International Congress on Sound and Vibration 2013, ICSV 2013,1, 14-21, (2013).

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1. Schematic of semi-hemispherical fluid domain above the vibrating annular plate