The Application of Reactive Ion Etching in Producing Free-Standing Microstructures and Its Effects on Low-Temperature Electrical Transport

Y. K. Kwong, K. Lin, P. Hakonen, J. M. Parpia and M. S. Isaacson

J.Vac. Sci. Technol., B 7, 2020 (1989). DOI: 10.1116/1.584670