Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 485-488, (2011), 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 DOI:10.1109/MEMSYS.2011.5734467
![](https://parpia.lassp.cornell.edu/sites/parpia/files/2011%20IEEE%20MEMS%2024.png)
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 485-488, (2011), 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 DOI:10.1109/MEMSYS.2011.5734467