Stress-based resonant volatile gas microsensor operated near the critically-buckled state

Daniel J. Joe, Yoav Linzon, Vivekananda P. Adiga, Robert A. Barton, Moonkyung Kim, Bojan Ilic, Slava Krylov, Jeevak M. Parpia, and Harold G. Craighead

J. App. Phys. 111 104517-1-9 (2012).http://dx.doi.org/10.1063/1.4720473

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