Shell-type micromechanical oscillator

Maxim Zalalutdinov, Keith Aubin, Christopher Michael, Rob Reichenbach, Tuncay Alan, Alan Zehnder, Brian Houston, Jeevak Parpia, Harold Craighead

Proc. of SPIE, 5116, 229-236, in Smart Sensors, Actuators and MEMS, Jung-Chih Chiao, Vijay K. Varadan, Carles Can´e, Editors. (2003).

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