Resistively actuated micromechanical dome resonators

R. B. Reichenbach, M. K. Zalalutdinov, K. L. Aubin, D. A. Czaplewski, B. Illic, B. H. Houston, H. G. Craighead, J. M. Parpia

Proc. of SPIE, 5344, 51-8, in MEMS/MOEMS Components and their Applications, Siegfried W. Janson, Albert K. Henning; Eds., (2004). doi: 10.1117/12.524175

phase map of 30 μm, resistive drive dome