Nanomechanical Resonant Structures in Nanocrystalline Diamond

L. Sekaric, J. M. Parpia and H. G. Craighead, T. Feygelson, B. H. Houston and J. E. Butler

Appl. Phys. Lett. 81,4455-7 (2002). http://dx.doi.org/10.1063/1.1526941

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