Anodically Bonded sub-micron Microfluidic Chambers

S. Dimov, R.G. Bennett, A. Corcoles, L. Levitin, B. Ilic, S.S. Verbridge, J. Saunders, A. Casey, and J.M. Parpia

Rev. Sci Inst. 81 013907-1-7 (2010). doi:10.1063/1.3291107.

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